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| 001 | 4820108 | ||
| 003 | OSt | ||
| 005 | 20210128161502.0 | ||
| 008 | 891120s1990 enka b 001 0 eng | ||
| 010 | _a 89070572 | ||
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_a0471924784 (U.S.) : _c$25.00 |
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_aDLC _cATU _dDLC |
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_aTK7871.85 _b.M82 1990 |
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_a621.381/52 _220 |
| 100 | 1 |
_aMorgan, D. V. _911731 |
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| 245 | 1 | 3 |
_aAn introduction to semiconductor microtechnology / _cD.V. Morgan, K. Board. |
| 250 | _a2nd ed. | ||
| 260 |
_aChichester ; _aNew York : _bJ. Wiley, _cc1990. |
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| 300 |
_axiv, 208 p. : _bill. ; _c24 cm. |
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| 504 | _aIncludes bibliographical references. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. _9132 |
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| 700 | 1 |
_aBoard, K. _911732 |
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