000 01176cam a22003134a 4500
001 12510004
003 OSt
005 20210125201928.0
008 010822s2002 maua b 001 0 eng
010 _a 2001044737
020 _a0072393912 (alk. paper)
040 _aDLC
_cATU
_dDLC
042 _apcc
050 0 0 _aTK7874
_b.H53 2002
082 0 0 _a621.381
_221
100 1 _aHsu, Tai-Ran.
_911090
245 1 0 _aMEMS and microsystems :
_bdesign and manufacture /
_cTai-Ran Hsu.
260 _aBoston :
_bMcGraw-Hill,
_cc2002.
300 _axii, 436 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references (p. 427-431) and index.
650 0 _aMicroelectronics.
_99172
650 0 _aMicroelectromechanical systems.
_911091
650 0 _aMicroelectronic packaging.
_911092
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/description/mh021/2001044737.html
856 4 1 _3Table of contents
_uhttp://www.loc.gov/catdir/toc/mh021/2001044737.html
906 _a7
_bcbc
_corignew
_d1
_eocip
_f20
_gy-gencatlg
942 _2lcc
_cBOOK
999 _c5675
_d5675