TY  - BOOK
AU  - Morgan,D.V.
AU  - Board,K.
TI  - An introduction to semiconductor microtechnology
SN  - 0471924784 (U.S.) :
AV  - TK7871.85 .M82 1990
U1  - 621.381/52 20
PY  - 1990///
CY  - Chichester, New York
PB  - J. Wiley
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references
ER  -