Morgan, D. V. An introduction to semiconductor microtechnology / D.V. Morgan, K. Board. - 2nd ed. - Chichester ; New York : J. Wiley, c1990. - xiv, 208 p. : ill. ; 24 cm. Includes bibliographical references. ISBN: 0471924784 (U.S.) : $25.00 LCCN: 89070572 Subjects--Topical Terms: Semiconductors--Design and construction. LC Class. No.: TK7871.85 / .M82 1990 Dewey Class. No.: 621.381/52