TY  - BOOK
AU  - Hsu,Tai-Ran
TI  - MEMS and microsystems: design and manufacture 
SN  - 0072393912 (alk. paper)
AV  - TK7874 .H53 2002
U1  - 621.381 21
PY  - 2002///
CY  - Boston
PB  - McGraw-Hill
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Includes bibliographical references (p. 427-431) and index
UR  - http://www.loc.gov/catdir/description/mh021/2001044737.html
UR  - http://www.loc.gov/catdir/toc/mh021/2001044737.html
ER  -