MEMS and microsystems : design and manufacture / Tai-Ran Hsu.

By: Hsu, Tai-RanMaterial type: TextTextPublication details: Boston : McGraw-Hill, c2002Description: xii, 436 p. : ill. ; 24 cmISBN: 0072393912 (alk. paper)Subject(s): Microelectronics | Microelectromechanical systems | Microelectronic packagingDDC classification: 621.381 LOC classification: TK7874 | .H53 2002Online resources: Publisher description | Table of contents
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Holdings
Item type Current library Call number Copy number Status Date due Barcode Item holds
ATU Book ATU Book SCHOOL OF APPLIED SCIENCE & ENGINEERING LIBRARY - ACCRA TECHNICAL UNIVERSITY
General Stacks
TK7874 .H53 2002 (Browse shelf(Opens below)) c1 Available 0000007974
ATU Book ATU Book SCHOOL OF APPLIED SCIENCE & ENGINEERING LIBRARY - ACCRA TECHNICAL UNIVERSITY
General Stacks
TK7874 .H53 2002 (Browse shelf(Opens below)) c2 Available 0000007975
ATU Book ATU Book SCHOOL OF APPLIED SCIENCE & ENGINEERING LIBRARY - ACCRA TECHNICAL UNIVERSITY
General Stacks
TK7874 .H53 2002 (Browse shelf(Opens below)) c3 Available 0000007976
Total holds: 0

Includes bibliographical references (p. 427-431) and index.

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